VersaSCAN OSP Non-contact Optical Surface Profiling

The VersaSCAN OSP integrates the Base with a high-accuracy, high-speed laser displacement sensor. The OSP technique uses diffuse reflection mechanism to measure topography of a sample. OSP can be used to measure topography, as a very sensitive leveling mechanism, or charting topography to be implemented with other scanning probe techniques for constant-distance mode operation.
  • Documents +

  • Specifications +


    Measurement Range ±10mm
    Laser Class 2, 650nm, 0.95mW
    Repeatability 0.025 microns
    Spot Size 50 microns at reference distance of 50mm
    Correct Postitioning Red light/green light
  • Video +

    Watch video demonstrations of the VersaSCAN OSP Non-contact Optical Surface Profiling

  • Experiments +


    Line Scan OSP Line Scan moves the laser head in a single direction and graphs the sensor measurement versus position. This intensity can be calibrated to be reported as topography. Either diffuse-scattered light or specural-reflected light can be measured.
    Area Scan OSP Area Scan performs several x-line scan experiments at incremented Y-position. This creates an area map. This topographic data can then be used as a background to run different techniques in constant-distance mode (SVP, SECM, SDS; SKP is easier to use CHM or CTM methods).