MEMs and NEMs

Techniques:  I-V, C-V, P-E, impedance, capacitance, permittivity, dielectric constant/loss, grain size, polarization thresholds, AC conductivity
Applications:    PC Memory, FeRAM, actuators, accelerometers, microphones, ink-jet heads, sensors
Types: Ferroelectric, piezoelectric, MEMs, NEMs, multiferroics, thin film, PZT, Barium Titanate, Perovskite

MEMs and NEMs (Micro/Nano Electro Mechanical systems) allow many functions including those from piezo/ferroelectric materials to be combined into a single device. Examples include 3D gyroscopes and accelerometers that are used in the latest games machines and hand held controllers as well as in military and aerospace inertial guidance applications.

Solartron Analytical provides the following test systems for the characterization of these materials:
  • The ModuLab XM MTS Test System provides complete time domain/AC device characterization using an extensive range of “Plug and Play” options:
  • The Model 1260A Impedance Gain Phase Analyzer is referenced in thousands of publications and is able to test capacitance/ C-V / impedance / Mott-Schottky from 10 µHz to 32 MHz (over 12 decades of frequency); enabling full characterization of ferro/piezoelectric materials
  • The Model 1296A Dielectric Interface System extends the impedance range of the 1260A to >100 Tohm in addition to providing greater accuracy by use of sample/reference techniques, and is often used in semiconductor applications
  • Temperature control options including Cryostats and Furnaces are available with all of the above measurement systems that provide automatic PC control of the sample temperature and allow complete material characterization